Deposition and growth limits for microelectronics
Aip Conference Proceedings, V.167 G W Rubloff; Topical Conference on Deposition and Growth : Limits for Microelectronics (1987 : Anaheim)
New York Aip 1987
Localização:
IF - Instituto de Física
(MS AIP v.167 ex.1 )(Acessar)