IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC '91 proceedings : October 21-23, 1991, Boston, Massachusetts
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (2nd 1991 Boston, Mass.) Semiconductor Equipment and Materials International
New York Institute of Electrical and Electronics Engineers Piscataway, NJ May be purchased from IEEE Service Center c1991
Localização: EPBC - Esc. Politécnica-Bib Central (621.3.032 Ad95 2. )(Acessar)