Papers from the 15th Workshop on Dielectrics in Microelectronics (WoDiM) : 23-25 June 2008, Bad Saarow (Berlin), Germany

Workshop on Dielectrics in Microelectronics (15th : 2008 : Bad Saarow-Pieskow, Germany) American Vacuum Society.

Journal of vacuum science & technology. B, Microelectronics and nanometer structures 2nd ser., v. 27, no. 1 (Jan./Feb. 2009), p. 208-555 (DLC) 94657460 (OCoLC)23276603

New York : Published by AVS through the American Institute of Physics 2009

Localização: IF - Instituto de Física    (J.Vac.Sci.Technol.B 2nd ser. v )(Acessar)