Effects of arrival rate and gas pressure on the chemical bonding and composition in titanium nitride films prepared on Si(100) substrates by ion beam and vapor deposition
Masao Matsuoka 1949- Sadao Isotani; Juan Carlos Ramirez Mittani; Jose Fernando Diniz Chubaci; K Ogata; N Kuratani
Journal of Vacuum Science & Technology A v. 23, n. 1, p. 137-141, 2005New York 2005
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