Effects of arrival rate and gas pressure on the chemical bonding and composition in titanium nitride films prepared on Si(100) substrates by ion beam and vapor deposition

Masao Matsuoka 1949- Sadao Isotani; Juan Carlos Ramirez Mittani; Jose Fernando Diniz Chubaci; K Ogata; N Kuratani

Journal of Vacuum Science & Technology A v. 23, n. 1, p. 137-141, 2005

New York 2005

Acesso online