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Efficient fabrication process for superconducting integrated circuits using photosensitive polyimide insulation layers
Efficient fabrication process for superconducting integrated circuits using photosensitive polyimide insulation layers
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Efficient fabrication process for superconducting integrated circuits using photosensitive polyimide insulation layers

Kikuchi, K. ; Goto, M. ; Nakagawa, H. ; Segawa, S. ; Tokoro, K. ; Taino, T. ; Myoren, H. ; Takada, S. ; Aoyagi, M.

IEEE transactions on applied superconductivity, 2005-06, Vol.15 (2), p.94-97 [Peer Reviewed Journal]

New York, NY: IEEE

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