Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
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1 |
Material Type: Livro
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Nanolithography and Patterning Techniques in MicroelectronicsD Bucknall David G BucknallCambridge Woodhead Publishing 2005Acesso online. A biblioteca também possui exemplares impressos. |
2 |
Material Type: Livro
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Semiconductor lithography principles, practices, and materialsWayne M. MoreauNew York Plenum Press c1988Localização: EPELM - Esc. Politécnica-Bib Eng Elet., Mec. e Naval (621.3.032 M813s )(Acessar) |
3 |
Material Type: Livro
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Microcircuit Engineering 89 proceedings of the International Conference on Microlithography, September 26-28, 1989, Cambridge, EnglandMicrocircuit Engineering 89 (1989 Cambridge, England) H AhmedAmsterdam Elsevier New York Tokyo Ohmsha New York, N.Y., U.S.A. Distributors for the United States and Canada, Elsevier Science Pub. Co. c1990Item não circula. Consulte sua biblioteca.(Acessar) |
4 |
Material Type: Livro
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Etching in microsystem technologyJ. M. Köhler (J. Michael), 1956-Weinheim ; Wiley-VCH, New York c1999Localização: IF - Instituto de Física (621.3815 K79e LABFF )(Acessar) |
5 |
Material Type: Livro
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Microlithography high integration in microelectronics : proceedings of the First Workshop, Rio de Janeiro, Brazil, Aug 28-Sept 1, 1989Workshop on "Microlithography : High Integration in Microelectronics" (1st 1989 Rio de Janeiro) Aldo Craievich; Gerardo Gerson Bezerra de Souza; Vitor BaranauskasSingapore World Scientific Teaneck, NJ c1990Localização: EEL - Engenharia de Materiais e outros locais(Acessar) |
6 |
Material Type: Livro
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Handbook of VLSI microlithography principles, technology, and applicationsWilliam B Glendinning; John N HelbertPark Ridge, N.J., U.S.A. Noyes Publications c1991Localização: EPELM - Esc. Politécnica-Bib Eng Elet., Mec. e Naval (621.3.049.771.15 G485h ) e outros locais(Acessar) |
7 |
Material Type: Livro
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Alternative lithography unleashing the potentials of nanotechnologyC. M Sotomayor TorresNew York Kluwer Academic/Plenum c2003Localização: EPBC - Esc. Politécnica-Bib Central (621.3.049.77 AL79 )(Acessar) |
8 |
Material Type: Livro
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Laser microfabrication thin film processes and lithographyDaniel J Ehrlich; Jeffrey Y TsaoBoston Academic Press c1989Localização: IFSC - Inst. Física de São Carlos (535.581 E33L )(Acessar) |
9 |
Material Type: Livro
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Materials for microlithography radiation-sensitive polymersL. F Thompson 1944-; C. G Willson 1939- (C. Grant); J. M. J Fréchet; American Chemical Society Division of Polymeric Materials: Science and Engineering; American Chemical Society Division of Polymer Chemistry; American Chemical Society Meeting (1984 Saint Louis, Mo.)Washington, D.C. The Society 1984Localização: EPBC - Esc. Politécnica-Bib Central (621.3.049.75 T375m )(Acessar) |
10 |
Material Type: Livro
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Introduction to microlithography theory, materials, and processingL. F Thompson 1944-; C. G Willson 1939- (C. Grant); M. J Bowden 1943-; American Chemical Society Division of Organic Coatings and Plastics Chemistry; American Chemical Society Meeting (1983 Seattle, Wash.)Washington, D.C. The Society 1983Localização: EPELM - Esc. Politécnica-Bib Eng Elet., Mec. e Naval (621.3.049.75 T375i )(Acessar) |