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A Threshold Voltage Deviation Monitoring Scheme of Bit Transistors in 6T SRAM for Manufacturing Defects DetectionLiu, Rui ; Li, Hao ; Yang, Zhao ; Wang, Guantao ; Chen, Zefu ; Zhang, PeiyongIEEE transactions on semiconductor manufacturing, 2024-05, Vol.37 (2), p.146-151 [Periódico revisado por pares]New York: IEEETexto completo disponível |