Influence of methane addition on the characteristics of magnetron sputtered hydrogenated carbon films
Ronaldo Domingues Mansano 1964- Paula Maria Nogueira; Luís da Silva Zambom; Patrick Bernard Verdonck 1958-; Marcos Massi; Homero Santiago Maciel; International Conference on Microelectronics and Packaging (14. 1999 Campinas)
ICMP 99: technical digest São Paulo : SBMicro/IMAPS, 1999
São Paulo SBMicro/IMAPS 1999
Item não circula. Consulte sua biblioteca.(Acessar)
The applicability of Langmuir probes for end point detection of polymer etching
Ronaldo Domingues Mansano 1964- Paula Maria Nogueira; Luís da Silva Zambom; Patrick Bernard Verdonck 1958-; Marcos Massi; Homero Santiago Maciel; International Conference on Microelectronics and Packaging (14. 1999 Campinas)
ICMP 99: technical digest São Paulo : SBMicro/IMAPS, 1999
São Paulo SBMicro/IMAPS 1999
Item não circula. Consulte sua biblioteca.(Acessar)