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Cone Angle Modulation of Silicon Nanocones through Double Etching Processes in Metal-Assisted Chemical EtchingChen, Hui ; Bian, Chenyu ; Zhang, Cheng ; Wang, Shaojun ; Zhang, BingchangJournal of physics. Conference series, 2023-03, Vol.2463 (1), p.12004 [Periódico revisado por pares]Bristol: IOP PublishingTexto completo disponível |