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Effects of heavy boron doping upon oxygen precipitation in czochralski silicon

S Hahn F A Ponce; W A Tiller; Vivian Stojanoff; Douglas Anderson Pereira Bulla; W E Castro Junior

v.64, n.9 , p.4454-65, 1988 Journal of Applied Physics

1988

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Article
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Effects of heavy boron doping upon oxygen precipitation in czochralski silicon

S Hahn F A Ponce; W A Tiller; Vivian Stojanoff; Douglas Anderson Pereira Bulla; W E Castro Junior

v.64, n.9 , p.4454-65, 1988 Journal of Applied Physics

1988

Check holdings(GetIt)

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by this author/creator:

  1. Hahn, S
  2. Tiller, W
  3. Bulla, D
  4. Castro Junior, W
  5. Stojanoff, V

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