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Material Type: Article
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Effects of heavy boron doping upon oxygen precipitation in czochralski silicon
S Hahn F A Ponce; W A Tiller; Vivian Stojanoff; Douglas Anderson Pereira Bulla; W E Castro Junior
v.64, n.9 , p.4454-65, 1988 Journal of Applied Physics
1988
Check holdings(GetIt)
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2
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Material Type: Article
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Effects of heavy boron doping upon oxygen precipitation in czochralski silicon
S Hahn F A Ponce; W A Tiller; Vivian Stojanoff; Douglas Anderson Pereira Bulla; W E Castro Junior
v.64, n.9 , p.4454-65, 1988 Journal of Applied Physics
1988
Check holdings(GetIt)
|