Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
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1 |
Material Type: Artigo
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1/f noise considerations for the design and process optimization of piezoresistive cantileversHarkey, J.A. ; Kenny, T.W.Journal of microelectromechanical systems, 2000-06, Vol.9 (2), p.226-235 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
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Material Type: Artigo
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100 kHz MEMS Vibratory GyroscopeLiewald, Jan-Timo ; Kuhlmann, Burkhard ; Balslink, Thorsten ; Trachtler, Martin ; Dienger, Matthias ; Manoli, YiannosJournal of microelectromechanical systems, 2013-10, Vol.22 (5), p.1115-1125 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
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Material Type: Artigo
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11-Megapixel CMOS-Integrated SiGe Micromirror Arrays for High-End ApplicationsWitvrouw, A. ; Haspeslagh, L. ; Pedreira, O.V. ; De Coster, J. ; De Wolf, I. ; Tilmans, H.A.C. ; Bearda, T. ; Schlatmann, B. ; van Bommel, M. ; de Nooijer, M.-C. ; Magnee, P.H.C. ; Lous, E.J. ; Hagting, M. ; Lauria, J. ; Vanneer, R. ; van Drieenhuizen, B.Journal of microelectromechanical systems, 2010-02, Vol.19 (1), p.202-214 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
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Material Type: Artigo
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14 MHz micromechanical oscillatorMattila, T. ; Jaakkola, O. ; Kiihamäki, J. ; Karttunen, J. ; Lamminmäki, T. ; Rantakari, P. ; Oja, A. ; Seppä, H. ; Kattelus, H. ; Tittonen, I.Sensors and actuators. A, Physical, 2002-04, Vol.97, p.497-502 [Periódico revisado por pares]Lausanne: Elsevier B.VTexto completo disponível |
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Material Type: Artigo
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16th European Workshop on Micromechanics (MME 2005)Enoksson, Professor PeterJournal of micromechanics and microengineering, 2006-06, Vol.16 (6) [Periódico revisado por pares]Bristol: IOP PublishingTexto completo disponível |
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Material Type: Artigo
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2D-finite-element simulations for long-range capacitive position sensorKuijpers, A A ; Krijnen, G J M ; Wiegerink, R J ; Lammerink, T S J ; Elwenspoek, MJournal of micromechanics and microengineering, 2003-07, Vol.13 (4), p.S183-S189 [Periódico revisado por pares]Bristol: IOP PublishingTexto completo disponível |
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Material Type: Artigo
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3-Dimensional Blow Torch-Molding of Fused Silica MicrostructuresJae Yoong Cho ; Jialiang Yan ; Gregory, Jeffrey A. ; Eberhart, Harald W. ; Peterson, Rebecca L. ; Najafi, KhalilJournal of microelectromechanical systems, 2013-12, Vol.22 (6), p.1276-1284 [Periódico revisado por pares]New York, NY: IEEETexto completo disponível |
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Material Type: Ata de Congresso
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3-nm gap fabrication using gas phase sacrificial etching for quantum devicesHamaguchi, K. ; Tsuchiya, T. ; Shimaoka, K. ; Funabashi, H.17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest, 2004, p.418-421Piscataway NJ: IEEETexto completo disponível |
9 |
Material Type: Artigo
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3C-SiC films on insulated substrates for high-temperature electrostatic-based resonatorsPlacidi, Marcel ; Pérez-Tomás, Amador ; Zielinski, Marcin ; Godignon, Philippe ; Millán, José ; Jordà, Xavier ; Mestres, Narcis ; Abadal, GabrielJournal of micromechanics and microengineering, 2010-11, Vol.20 (11), p.115007 [Periódico revisado por pares]Bristol: IOP PublishingTexto completo disponível |
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Material Type: Artigo
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A 0.1-40 GHz broadband MEMS clamped-clamped beam capacitive power sensor based on GaAs technologyHan, Juzheng ; Liao, XiaopingJournal of micromechanics and microengineering, 2014-06, Vol.24 (6), p.65024-7 [Periódico revisado por pares]Bristol: IOP PublishingTexto completo disponível |