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Material Type: Recurso Textual
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Electron, ion, and photon beam technology and nanofabrication
International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (49th 2005 Grande Lakes, Flórida) Martin Peckerar
Journal of Vacuum Science & Technology B vol.23, n.6, 2005
New York AIP 2005
Localização:
IF - Instituto de Física
(J.Vac.Sci.Technol.B v.23 n.6 )(Acessar)
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