Amorphous hydrogenated carbon films deposited by PECVD influence of the substrate temperature on film growth and microstruture
G Capote R Prioli; P. M Jardim; Antonio Ricardo Zanatta; L. GJacobsohn; F. L Freire Junior; International Conference on Amorphous and Microcrystalline Semiconductors : Science and Technology - ICAMS (20. 2003 Campos do Jordão)
Abstract Book and Final Program Campinas, 2003
Campinas 2003
Localização:
IFSC - Inst. Física de São Carlos
(PROD009411 ) e outros locais(Acessar)
Amorphous hydrogenated carbon films deposited by PECVD influence of the substrate temperature on film growth and microstructure
G. Capote R Prioli; P. M Jardim; Antonio Ricardo Zanatta; L. GJacobsohn; F. L Freire Junior; International Conference on Amorphous and Microcrystalline Semiconductors - Science and Technology (20. 2003 Campos do Jordão)
Journal of Non-Crystalline Solids Amsterdam v. 338/340, p. 503-508, Jun. 2004
Amsterdam Elsevier Science 2004
Localização:
IFSC - Inst. Física de São Carlos
(PROD009871 ) e outros locais(Acessar)
A new pathway for Si nanocrystal formation oxi-reduction induced by impurity implantation
L. G. Jacobsohn Antonio Ricardo Zanatta; J. K Lee; D. W Cooke; B. L Bennett; C. J Wetteland; J. R Tesmer; M Nastasi; MRS Spring Meeting (2003 San Francisco); Symposium T: Nanostructuring Materials with Energetic Beams (2003 San Francisco)
Materials Research Society Symposium Proceedings Warrendale : Materials Research Society - MRS, 2003 v. 777
Warrendale Materials Research Society - MRS 2003
Localização:
IFSC - Inst. Física de São Carlos
(PROD009639 ) e outros locais(Acessar)